MaterialsAtlas Reading List

High-κ gate dielectrics: Current status and materials properties considerations

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Review/Survey Paper for Dielectric materials. Review/survey candidate for mapping the literature, mechanisms, methods, and open questions in Dielectric materials.

Citation: G. D. Wilk, Robert M. Wallace, J. Anthony. High-κ gate dielectrics: Current status and materials properties considerations. Journal of Applied Physics 2001. https://doi.org/10.1063/1.1361065

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TypeReading List
DomainDielectric materials
LicenseScholarly article; see publisher
ContributorsG. D. Wilk, Robert M. Wallace, J. Anthony