MaterialsAtlas Reading List
Laser-scanning tomography: a survey of recent investigations in semiconductor materials
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Review/Survey Paper for Doping design. Review/survey candidate for mapping the literature, mechanisms, methods, and open questions in Doping design.
Citation: J P Fillard, P Gall, J Bonnafe, M Castagne, T Ogawa. Laser-scanning tomography: a survey of recent investigations in semiconductor materials. Semiconductor Science and Technology 1992. https://doi.org/10.1088/0268-1242/7/1a/054
Acknowledgement: Curated by MaterialsAtlas Open Resources from OpenAlex, Crossref, and manual landmark-paper review.